Development of an Automatic Contact Hole Mask Defect Classidication System for the Inline Inspection of TFT-LCD Array Engineering
碩士 === 中原大學 === 機械工程研究所 === 95 === Currently, most equipments used in TFT-LCD manufacturing can only detect defects from panels. For example, some of the defects are blob Mura, large area Mura, and line Mura that are a typical region defect of TFT-LCD. However, Mura inspection is performed in cell o...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/88144493456632309702 |