Development of an Automatic Pixel Electrode Mask Defect Classification System for the Inline Inspection of TFT-LCD Array Engineering
碩士 === 中原大學 === 機械工程研究所 === 95 === Currently, most equipments used in TFT-LCD manufacturing cannot classify defects, but detect them. However, to repair the defects and maintain the equipments, we need to know the types of the defects exactly. So if we can develop a system which can classify the def...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/67006407140531344043 |