Analysis and Test for Nano-Mechanical Properties of Thin Copper Film

碩士 === 中原大學 === 機械工程研究所 === 95 === This thesis presents an experimental result for mechanical properties and creep phenomenon on thin copper film by the use of nanoindentaton test. Also determines the mechanical properties of single crystal copper bulk and polycrystal thin copper film by finite elem...

Full description

Bibliographic Details
Main Authors: Chih-Kang Huang, 黃治綱
Other Authors: Yeon-Pun Chang
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/05903885636121918812