Design of A Manified Stucture for Precision Position Stage
碩士 === 中原大學 === 機械工程研究所 === 95 === When semiconductor process into nano-scale, In manufacture or measure device, related industries increase the requirement to high precision high performance equipment. Precision Positioning is the key point technology for the device. In general, most positioning st...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/71366079382456640769 |