Study of ohmic contacts to p-type AlGaN
碩士 === 清雲科技大學 === 電子工程研究所 === 94 === This paper ohmic contact the material extremely manufactures in view of the P-type AlGaN in the electricity, in the regulation proposed two kind of different metals groups Pt/Pd/Au and the Pd/Au method manufactures the ohm contact, and studies its difference, in...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2008
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Online Access: | http://ndltd.ncl.edu.tw/handle/36408220164205897229 |