Zn1-xZrxO Films Prepared by Sol-gel Process and Its Application in Thin Film Transistors

碩士 === 逢甲大學 === 材料科學所 === 95 === This study attempted to replace 2-methoxyethanol with IPA and ethanol which be wide used in the lab, and used Zinc acetate and MEA as precursor and chelating to prepare ZnO sol and thin film. At the same time, we used different heat treating process to improve the qu...

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Bibliographic Details
Main Authors: Kai-shiung Fan, 范凱雄
Other Authors: Chien Yie Tsay
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/27411229635292769501