Zn1-xZrxO Films Prepared by Sol-gel Process and Its Application in Thin Film Transistors
碩士 === 逢甲大學 === 材料科學所 === 95 === This study attempted to replace 2-methoxyethanol with IPA and ethanol which be wide used in the lab, and used Zinc acetate and MEA as precursor and chelating to prepare ZnO sol and thin film. At the same time, we used different heat treating process to improve the qu...
Main Authors: | , |
---|---|
Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
|
Online Access: | http://ndltd.ncl.edu.tw/handle/27411229635292769501 |