The Zn1-xMgxO films prepared by sol-gel process and used as active layer for thin film transistors
碩士 === 逢甲大學 === 材料科學所 === 95 === This study successfully prepared ZnMgO thin films by sol-gel process and took Mg-additive up with thin film properties. In addition, the typical bottom-gate structure device of Zn1-xMgxO-base TFTs was fabricated by hybrid method that combined standard micro-electrica...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/93308946697852006064 |