In-situ Growth of Si-NCs in Si3N4 on SONOS Memory
碩士 === 逢甲大學 === 電子工程所 === 95 === Purpose that I research continuous deposition method to growth Storage Layer. At First, My main research to finish hybrid stack structure of trapping layer by the method. Because Program Speed is paid attention to, we introduce to NC’s. It can increase program speed...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/55083154941748413173 |