Fabrication, Testing and Structural Analysis of Electro-Thermal Microactuators
碩士 === 逢甲大學 === 機械工程學所 === 95 === Due to the heat generation from an applied voltage, a non-uniform thermal expansion may occur in an electro-thermal micro-actuator, and thus the tip of the structure will deflect and act as an actuator. In this study, electro-thermal micro-actuators were first fabri...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/99034383763641471195 |