The Dynamic Modeling and Static Characteristics Analysis of Electro-Thermal Microactuators
碩士 === 逢甲大學 === 機械工程學所 === 95 === According to the advantages such as strengthened output force, easy operation, and simple manufacturing process, the electro-thermal micro-actuators are popular in current micro-electro-mechanical systems (MEMS). In this thesis, we adopt a lumped modeling approach t...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14476140275833195946 |