| Summary: | 碩士 === 逢甲大學 === 機械工程學所 === 95 === According to the advantages such as strengthened output force, easy operation, and simple manufacturing process, the electro-thermal micro-actuators are popular in current micro-electro-mechanical systems (MEMS). In this thesis, we adopt a lumped modeling approach that separates the actuator structure apart into several components of electrical resisters, heat resisters, heat capacitors, mechanical springs, etc., and then constructs the mathematical model for the system. The research first analyzes the static relationship between the input voltage and the output displacement and verifies it through experiments, and then discusses the actuating capability for three different actuator structures. The research can contribute to the design of future micro-actuators.
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