A Study on the Mechanical Properties and Stresses of Thin Films Deposited on the Circular Substrates
碩士 === 逢甲大學 === 機械工程學所 === 95 === Since the thin films have been widely utilized in the microelectro mechanical systems (MEMS), optroelectronics (OE), etc., the mechanical properties and stresses of thin films play the important role in the devices reliability. The thesis aims to characterize the me...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/05589477475945722956 |