Mechanisms of Nanowiring Dynamics for the Structure Modulation of Gallium Nitride (GaN) at Micro-and/or Nanometer Scales in the Chemical Vapor Deposition Process
碩士 === 和春技術學院 === 電機工程研究所 === 95 === This research uses the simple thermal Chemical Vapor Deposition (CVD) to deposit Gallium Nitride (GaN) on Si (111) substrate under several different experimental processing parameters. processing parameters, microstructures of the depositions can be found as many...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/45463518788944437755 |