Structure Analyses and Optical Measurements of Indium-Gallium-Nitrogen Oxide at Micro-and/or Nanometer Scales in the Chemical Vapor Deposition
碩士 === 和春技術學院 === 電機工程研究所 === 96 === This research used Chemical Vapor Deposition (CVD) to grow the Gallium Nitride, Indium Gallium Nitride, Indium Nitride and so on their related compound on the silicon substrate. Different experimental parameters, including the sample position in the quartz tub...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
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| Online Access: | http://ndltd.ncl.edu.tw/handle/39437529704755177103 |