Two-Wavelength Dynamic Thickness Uniformity Control of TiO2 Thin Film with RF Magnetron Sputtering – A Simulate of Large Area Coating
碩士 === 輔仁大學 === 物理學系 === 95 === The thickness is an important factor to affect the optical properties of the optical thin film, and the thickness uniformity control is also an important factor for the large area coating. The properties of thin film are not broken because the thin film has good thick...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/85607959098925398507 |