An investigation of wear properties of TiN/CrN films deposited by reactive magnetron sputtering
碩士 === 崑山科技大學 === 機械工程研究所 === 95 === A method named the separation target is adopted for this experiment. The films in this study are prepared by using a Cr and nitrogen gas at 5*10-6torr for CrN films and Ti target for TiN coatings. The steel substrates (SKD11) are set as a base. This study can the...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/17077631843501898050 |