| Summary: | 碩士 === 崑山科技大學 === 機械工程研究所 === 95 === A method named the separation target is adopted for this experiment. The films in this study are prepared by using a Cr and nitrogen gas at 5*10-6torr for CrN films and Ti target for TiN coatings. The steel substrates (SKD11) are set as a base. This study can therefore discuss the effect of depositing the Cr and nitrogen gas on TiN/CrN films as follows: what the different mutilayers influence the surface structure and mechanical properties is.
According to the result of the analysis in this experiment, TiN/CrN multilayers cause the crystallization of the films. The peaks on TiN and CrN present polycrystalline. Among these two peaks, TiN peak by (320) and (200) flatly grows and CrN peak by (110) (020) and (200) also flatly grows. The highest orientation stands on TiN (320) Consequently, the mechanical properties have been obviously enhanced, decreasing the coefficient of friction, extending the endurance of using materials, and having a better anti to wear and tear. At annealing at 500℃ one hour later, there are 64 TiN/CrN mutilayers owning their best anti to wear and tear.
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