Studies on Structure and Properties of Transparent Conductive Zno:Al(Sc) Thin-Films Prepared by Asymmetric Bipolar Pulsed-DC Reactive Magnetron Sputtering Method.
碩士 === 明志科技大學 === 化工與材料工程研究所 === 96 === In this research, transparent conductive ZnO:Al(Sc) thin films were prepared by asymmetric bipolar pulsed-dc reactive magnetron sputtering method (ABPDRMS) on the STN-glass. Four different alloys, Zn, Zn-1.6wt%Al, Zn-2.0wt%Al, Zn-1.6wt%Al-0.4wt% Sc, were used...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2008
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/77252688698607997380 |