A Study on Growth Mechanism of ZnO Microstructures Using MOCVD
碩士 === 國立中興大學 === 材料工程學系所 === 95 === The ZnO microstructures were deposited on sapphire substrates using a vertical metalorganic-chemical-vapor-deposition (MOCVD) system. At first, the effects of growth temperature on the ZnO characteristics were studied. It was found that the surface morphology of...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/18189274752437491827 |