Design and Fabrication of RF MEMS Switches Combined with Inductors
碩士 === 國立中興大學 === 機械工程學系所 === 95 === This paper studies the structural design and performance analysis of RF micromechanical system (MEMS) capacitance switches. The fabrication of the switches uses the standard 0.35μm 2P4M (double polysilicon four metal) CMOS (complementary metal oxide semiconductor...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/35654821465318700079 |