FET Micro-pressure sensors integrated with readout circuitry
碩士 === 國立中興大學 === 機械工程學系所 === 95 === This study presents a FET (field effect transistor) micro pressure sensor manufactured by the commercial CMOS (complementary metal oxide semiconductor) process and a post-process. The benefits of the pressure sensor are easy post-process, small area, low cost, an...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/88571792595590706965 |