FAST PATTERNING MICROSTRUCTURES USING INKJET PRINTING CONFORMAL MASKS
碩士 === 國立中興大學 === 精密工程學系所 === 95 === The presented paper describes a novel process using inkjet printing to pattern a mask onto photoresist for further microstructure formation. The advantages of using the inkjet printing a mask include no Cr photomask required, suitable for non-planar substrate, sc...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68807100196406170074 |