Nonlinear Optimal Parameter Estimation for a Precision Positioning Table

碩士 === 國立勤益科技大學 === 機械工程系 === 95 === The precision positioning table is widely used in CNC machine tool, automation factories, and semiconductor industries etc. As the industrial technology grows rapidly, the precision positioning table needs to be more accurate. In this situation, the micro-scale n...

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Bibliographic Details
Main Authors: Lin-Hsiang Huang, 黃麟翔
Other Authors: Chun-Chih Chiu
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/47628560305924259542