Nonlinear Optimal Parameter Estimation for a Precision Positioning Table
碩士 === 國立勤益科技大學 === 機械工程系 === 95 === The precision positioning table is widely used in CNC machine tool, automation factories, and semiconductor industries etc. As the industrial technology grows rapidly, the precision positioning table needs to be more accurate. In this situation, the micro-scale n...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/47628560305924259542 |