Fault diagnosis on CVD equipment via Neural Network Approach
碩士 === 國立成功大學 === 工業與資訊管理學系專班 === 95 === The integrated circuits (ICs) industry is the industry with technology and capital intensively. Thus how to make the equipment utilization higher and to compensate the equipment depreciation cost, to reduce product cost, and to create a company’s competitive...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/78959151770731764176 |