Deposition of diamond film and diamond-like carbon film by hollow cathode arc ionic plating system and its application on nanoimprinting lithography
博士 === 國立成功大學 === 化學工程學系碩博士班 === 95 === Hollow cathode arc (HCA) ion plating system has been developed to deposit hydrogen-free diamond-like carbon (DLC) films and nanocrystalline diamond films free of micro-particles. Then, DLC and diamond films were studied as mold materials or as anti-adhesive l...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/68776606163898956208 |