A study of the morphology and sensitivity of Ti- and Pt-doped Ga2O3 thin film prepared by rtheotaxial growth and thermal oxidation
碩士 === 國立成功大學 === 化學工程學系碩博士班 === 95 === Thin-film semiconductor is of use in an extremely wide of application, in recent years. The major sensing mechanism of semiconductor gas sensor is base on the change of electrical properties with gas composition, the gas sensitivity can be calculated as the ra...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/51511299311314912725 |