Thin film preparation and microwave measurement of the High k dielectric materials and its application on microwave filters

博士 === 國立成功大學 === 微電子工程研究所碩博士班 === 95 === This dissertation divides into three parts: (a) High k thin film preparation; (b) microwave measurements of the dielectric materials and (c) design of the integrated passive filter. A microwave High k dielectric thin film was firstly fabricated. Zirconium ti...

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Bibliographic Details
Main Authors: Ru-Yuan Yang, 楊茹媛
Other Authors: YAN-KUIN SU
Format: Others
Language:en_US
Online Access:http://ndltd.ncl.edu.tw/handle/64361633033496927315