ZnO Photoconductive Sensors and ZnO/GaN Heterojunction light-emitting-diodes
碩士 === 國立成功大學 === 微電子工程研究所碩博士班 === 95 === In this thesis, electrical and optical properties of Ru contact on n-type ZnO epitaxial layers were investigated. 100-nm-thick Ru films were deposited onto n-ZnO epitaxial layers by rf sputtering. It was found hat highly transparent RuOx was form after O2...
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/07896260328503202079 |