Design and Dynamic Analysis of an Innovative Planar Micro-gyroscope
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 95 === An innovative micro-gyroscope design, which is capable of detecting three-dimension angular excitations, is proposed in this thesis. The coupling effect between drive mode and sense mode is reduced by restricting each movable element to move in direction orth...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/86800331043930845344 |