Stitching of White-Light Interferometry Profile by Applying Digital-Image-Correlation Method

碩士 === 國立成功大學 === 機械工程學系碩博士班 === 95 === This thesis aims to build a large horizontal range of white light interferometry techniques applied in the mirco-structure surface profile measurement. It particularly focuses on the surface profile of micro-eletro-mechanical to perform the non-destructiveness...

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Bibliographic Details
Main Authors: Li-chi Yeh, 葉力旗
Other Authors: Terry Yuan-Fang Chen
Format: Others
Language:zh-TW
Published: 2007
Online Access:http://ndltd.ncl.edu.tw/handle/46532213493711784816