Stitching of White-Light Interferometry Profile by Applying Digital-Image-Correlation Method
碩士 === 國立成功大學 === 機械工程學系碩博士班 === 95 === This thesis aims to build a large horizontal range of white light interferometry techniques applied in the mirco-structure surface profile measurement. It particularly focuses on the surface profile of micro-eletro-mechanical to perform the non-destructiveness...
Main Authors: | , |
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Other Authors: | |
Format: | Others |
Language: | zh-TW |
Published: |
2007
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Online Access: | http://ndltd.ncl.edu.tw/handle/46532213493711784816 |