Study of Dry Etching Technology for Oxide-Confined VCSELs Fabrication
碩士 === 國立成功大學 === 光電科學與工程研究所 === 95 === The VCSELs are mainly used as light source for optical communication. The VCSELs are more attractive than edge-emitting lasers due to a circular output beam generated, suitable for on-wafer testing, low current consumption, and high frequency modulation capabi...
| Main Authors: | , |
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| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/66589933003741688450 |