Photoluminescence studies on ZnO grown by different sputtering power and annealing temperature
碩士 === 國立成功大學 === 光電科學與工程研究所 === 95 === In this study, ZnO films grown by RF sputtering method are investigated by photoluminescence and scanning electron microscope. ZnO film arises from metal Zn sputtered on substrate at different sputtering sputtering power (150~210W) and then annealed at differe...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/53726390972209842272 |