System Framework and Applications of Virtual Metrology
碩士 === 國立成功大學 === 製造工程研究所碩博士班 === 95 === Virtual metrology (VM) is a technology to predict metrology variables using information about the process state for every workpiece. An advanced dual-phase VM scheme possessing the properties of data preprocessing, dual-phase conjecturing, reliance-level eval...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/70740583153421993616 |