System Framework and Applications of Virtual Metrology

• Main Authors: Jia-Mau Jian, 簡嘉懋
• Other Authors: Fan-Tien Cheng
• Format: Others
• Language: zh-TW
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/70740583153421993616

碩士 === 國立成功大學 === 製造工程研究所碩博士班 === 95 === Virtual metrology (VM) is a technology to predict metrology variables using information about the process state for every workpiece. An advanced dual-phase VM scheme possessing the properties of data preprocessing, dual-phase conjecturing, reliance-level evaluating, and similarity-level appraising was proposed by our research group. This dual-phase VM scheme is applicable for all the typical VM applications. Among those applications, workpiece-to-workpiece (W2W) advanced process control (APC) is the most critical. For easy implementation and deployment, a generic-virtual-metrology (GVM) framework shall be designed. The purpose of this thesis is to develop the GVM framework. The Pluggable Designs of GVM Framework could reduce the dependencies between module and framework, and make the GVM Framework to have higher adaptability. By applying this GVM framework, different VM functional modules can be easily implemented and applied for various kinds of VM applications, especially for W2W APC.