Fabrication of stacked polymer and metal multilayer on flexible tactile sensor
碩士 === 國立成功大學 === 奈米科技暨微系統工程研究所 === 95 === Tactile sensors are widely applied in electro-mechanic and bio-medical field. The aim of this study is designing the tactile sensor by stacking polymer and metal multilayer on polymer substrate in MEMS. A novel sensor design is presented that process omit...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/14764255123326441296 |