Fabrication of stacked polymer and metal multilayer on flexible tactile sensor
碩士 === 國立成功大學 === 奈米科技暨微系統工程研究所 === 95 === Tactile sensors are widely applied in electro-mechanic and bio-medical field. The aim of this study is designing the tactile sensor by stacking polymer and metal multilayer on polymer substrate in MEMS. A novel sensor design is presented that process omit...
Main Authors: | Chih-Chang Wu, 吳志昌 |
---|---|
Other Authors: | Chen-Kui Chung |
Format: | Others |
Language: | zh-TW |
Published: |
2007
|
Online Access: | http://ndltd.ncl.edu.tw/handle/14764255123326441296 |
Similar Items
-
Fabrication and Characteristic Analysis of Novel Flexible Tactile Sensors
by: Suen, Min Sheng, et al.
Published: (2018) -
Polymer-micromachined Table-shaped Flexible Tactile Sensor
by: Lee, Jeong Il
Published: (2014) -
Design, Fabrication and Characteristic Analysis of Transparent Flexible Tactile Sensor
by: Chen, Tsun-Yi, et al.
Published: (2014) -
Flexible Electronics on Tactile and Heart Beat Sensors
by: Wen-Yang Chang, et al.
Published: (2008) -
Flexible Electronics Sensors for Tactile Multi-Touching
by: Shao-Hsing Yeh, et al.
Published: (2009-02-01)