Self-Assembly Functionalized Nanowire Field-Effect Transistors and Nanogap Electrodes for Nanoelectronics and Nanobiosensors
博士 === 國立暨南國際大學 === 電機工程學系 === 95 === Scanning probe lithography (SPL) and E-beam nanolithography (EBL) were adopted in conjunction with anisotropic etching to fabricate a silicon nanowire field-effect transistor (SiNW-FET) and a nanoflash memory on a silicon-on-insulator (SOI) wafer. Also, fabricat...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/37694480419364614073 |