A study on fabrication of one-dimensional periodic gratings by using holographic lithography
碩士 === 國立交通大學 === 光電工程系所 === 95 === In this thesis, we use two-beam interference to fabricate one-dimensional periodic gratings on the SU-8 negative photoresist, which is deposited by spin coating onto glass substrates. By properly adjusting the exposure energies and the post-exposure-bake time, the...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10588610269110821144 |