A study on fabrication of one-dimensional periodic gratings by using holographic lithography
碩士 === 國立交通大學 === 光電工程系所 === 95 === In this thesis, we use two-beam interference to fabricate one-dimensional periodic gratings on the SU-8 negative photoresist, which is deposited by spin coating onto glass substrates. By properly adjusting the exposure energies and the post-exposure-bake time, the...
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2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/10588610269110821144 |
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ndltd-TW-095NCTU51240512015-10-13T16:13:48Z http://ndltd.ncl.edu.tw/handle/10588610269110821144 A study on fabrication of one-dimensional periodic gratings by using holographic lithography 以全像微影法製作一維週期性結構 曾士芫 碩士 國立交通大學 光電工程系所 95 In this thesis, we use two-beam interference to fabricate one-dimensional periodic gratings on the SU-8 negative photoresist, which is deposited by spin coating onto glass substrates. By properly adjusting the exposure energies and the post-exposure-bake time, the structure of the gratings can be modified. In addition, we also measure the diffraction efficiency, and try to explain the grating diffraction by scalar diffraction theory. 許根玉 林烜輝 2007 學位論文 ; thesis 62 zh-TW |
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NDLTD |
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zh-TW |
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Others
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NDLTD |
| description |
碩士 === 國立交通大學 === 光電工程系所 === 95 === In this thesis, we use two-beam interference to fabricate one-dimensional periodic gratings on the SU-8 negative photoresist, which is deposited by spin coating onto glass substrates. By properly adjusting the exposure energies and the post-exposure-bake time, the structure of the gratings can be modified. In addition, we also measure the diffraction efficiency, and try to explain the grating diffraction by scalar diffraction theory.
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許根玉 |
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許根玉 曾士芫 |
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曾士芫 |
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曾士芫 A study on fabrication of one-dimensional periodic gratings by using holographic lithography |
| author_sort |
曾士芫 |
| title |
A study on fabrication of one-dimensional periodic gratings by using holographic lithography |
| title_short |
A study on fabrication of one-dimensional periodic gratings by using holographic lithography |
| title_full |
A study on fabrication of one-dimensional periodic gratings by using holographic lithography |
| title_fullStr |
A study on fabrication of one-dimensional periodic gratings by using holographic lithography |
| title_full_unstemmed |
A study on fabrication of one-dimensional periodic gratings by using holographic lithography |
| title_sort |
study on fabrication of one-dimensional periodic gratings by using holographic lithography |
| publishDate |
2007 |
| url |
http://ndltd.ncl.edu.tw/handle/10588610269110821144 |
| work_keys_str_mv |
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1717770034462326784 |