Bias-enhanced Chemical Vapor Deposition of Uniform Diamonds-The Study of Nucleation and Growth
博士 === 國立交通大學 === 材料科學與工程系所 === 95 === The dissertation is divided into three main parts. The first part, we designed a Mo anode which improved the distribution of microwave plasma and dc glow discharge to deposit uniform diamond films on Si substrates. In the second part, we discuss the effect of t...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Online Access: | http://ndltd.ncl.edu.tw/handle/68146471361680822765 |