Mining the Yield Patterns of Semiconductor Wafer to Identify Abnormal Process Equipments
碩士 === 國立交通大學 === 管理學院碩士在職專班資訊管理組 === 95 === Taiwan semiconductor companies must design high-level technology product and increase the wafer yield rate to enhance their competitive advantages. However, the wafer process is very complex with a lot of steps and factors to affect the yield rate. Accord...
| Main Authors: | , |
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2006
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| Online Access: | http://ndltd.ncl.edu.tw/handle/46962319024249256814 |