The Study of Vertical Channel Low Temperature Polycrystalline Silicon Thin-Film Transistors Fabricated by Ni –Silicide Induced Lateral Crystallization Technology
碩士 === 國立交通大學 === 電子工程系所 === 95 === ABSTRACT In this thesis, we first study about horizontal channel poly crystalline thin film transistors by metal induced lateral crystallization (MILC). It is known that nickel deposition on source and drain regions cause metal contaminations on these regions aft...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/56566905124041369558 |