The Investigation of Annealing Effect on the Inductance Variance of On-Chip Spiral Inductor
碩士 === 國立交通大學 === 電子工程系所 === 95 === In At this paper, thermal annealing effect on the inductor performance has been investigated. 30 mins. 600�aC thermal annealing performed to have ~7.4% electrical resistivity reduction of Cu film won’t result in any inductance variance of on-chip spiral inductor...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/19390443366433980674 |