The Investigation of Annealing Effect on the Inductance Variance of On-Chip Spiral Inductor

• Main Authors: Wen-Chen Lai, 賴文駿
• Other Authors: Y. T. Cheng
• Format: Others
• Language: en_US
• Published: 2007
• Online Access: http://ndltd.ncl.edu.tw/handle/19390443366433980674

碩士 === 國立交通大學 === 電子工程系所 === 95 === In At this paper, thermal annealing effect on the inductor performance has been investigated. 30 mins. 600�aC thermal annealing performed to have ~7.4% electrical resistivity reduction of Cu film won’t result in any inductance variance of on-chip spiral inductor that made of the same Cu. For a total of 18 3.5-circles on-chip spiral inductors, the inductance variance before and after the thermal anneal only ranges from -2.25% to 0.41%. Meanwhile, the resonant frequency associated with the inductance variance also changes from -8.22% to 1.68%. According to hypothesis test statistical method, it shows that these variances are not correlated which can be attributed to experimental variation and there is, in fact, no thermal annealing effect on the inductor performance. The results also indicate that the electrical conductivity is independent of the inductance of on-chip spiral inductor which is matched with the prediction of Greenhouse model but totally contradicts with the model proposed by Chen et al..