A Study on the Effects of Plasma Treatment on Double-Gated Nanowire Poly-Si Thin-Film Transistors
碩士 === 國立交通大學 === 電子工程系所 === 95 === In this thesis, we utilize the top-down approach to fabricate double-gated nanowire thin film transistor. Solid-phase crystallization was employed to grow polycrystalline-silicon nano-channel, and NH3 or N2 plasma was used to improve the material quality and devic...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | en_US |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/xsezkg |