The Electrochemical Behaviors of pH-Sensing Device Constructed by RF Sputtered Ta2O5 and IrO2 Films
碩士 === 國立交通大學 === 電子物理系所 === 95 === The ion-sensitive field effect transistor was put forward by P. Bergveld in 1970. And improvement of materials and structures has been researched extensively. With the progress of electronic engineering of solid states and thin films technology, ion-sensitive fiel...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/28723735135665482861 |