Study on alignment characteristic and surface analysis on polyimide treated by UV irradiation and Ion Beam Bombardment
碩士 === 國立交通大學 === 電子物理系所 === 95 === In this work, two non-contact alignment method using Ion Beam Bombardment and UV irradiation are investigated. The surface treated by these two method are studied by using S46-F8 film. A series of surface analysis, such as AFM, surface energy measurement, and XP...
| Main Authors: | , |
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| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/24767833465223892503 |