Multiple-Input-Multiple-Output Chemical Mechanical Polish Process Control
碩士 === 國立交通大學 === 機械工程系所 === 95 === Chemical-Mechanical Polish is an extremely complicated process because it involves physical, chemical, and mechanical field [1]. There are many complicated factors which may affect only one output parameter such as removal rate. For non-planarization index alone,...
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| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
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| Online Access: | http://ndltd.ncl.edu.tw/handle/69463211064074651989 |