The Effects of Width, Via number and Analytical Method on the Mean-time-to-failure of Electromigration for Cu Interconnects

碩士 === 國立交通大學 === 工學院碩士在職專班半導體材料與製程設備組 === 95 ===

Bibliographic Details
Main Author: 陳明珠
Other Authors: 陳智
Format: Others
Language:zh-TW
Online Access:http://ndltd.ncl.edu.tw/handle/81869877952745387074