Novel monitoring method with error compensation
碩士 === 國立中央大學 === 光電科學研究所碩士在職專班 === 95 === We introduced a way to estimate the fluctuation of refractive index during thin film deposition through an optical monitor. The thicknesses and error compensated thickness for each layer were analyzed. A novel monitoring method was thereby derived. With rev...
| Main Authors: | , |
|---|---|
| Other Authors: | |
| Format: | Others |
| Language: | zh-TW |
| Published: |
2007
|
| Online Access: | http://ndltd.ncl.edu.tw/handle/46163086961398559383 |